The thermal decomposition of β-trifluoroethylsilanes (CF3CH2SiFx(CH3)3−x where x = 0–3) is described by the reaction[Formula: see text]The Arrhenius parameters for the series of silanes studied are as follows:[Formula: see text]Some results for the decomposition of the hot molecule CF3CH2SiF3* are reported.[Formula: see text]