A high-purity gas for plasma reaction having an octafluorocyclopentene purity of at least 99.9% by volume based on the total volume of the gas for plasma reaction, wherein the total content of nitrogen gas and oxygen gas, contained as trace gaseous ingredients of the remainder, is not larger than 200 ppm by volume. This high-purity gas for plasma reaction can be produced by (1) a process of distilling crude octafluoro-cyclopentene in an inert gas of group 0, or (2) a process of distilling crude octafluorocyclopentene into a purity of at least 99.9% by volume, and then, removing an impurity remainder.
一种等离子体反应用高纯度气体,按等离子体反应用气体的总体积计算,八
氟环戊烯的纯度至少为 99.9%(按体积计算),其中氮气和
氧气的总含量不大于 200 ppm(按体积计算)。这种用于等离子体反应的高纯度气体可以通过以下方法制得:(1) 在 0 族惰性气体中蒸馏粗八
氟环戊烯;或 (2) 将粗八
氟环戊烯蒸馏至纯度至少为 99.9%(按体积计算),然后除去杂质余量。