A composition comprises a disilylamine precursor. The disilylamine precursor comprises a functional group attached to a nitrogen atom of the dilsilylamine precursor. The functional group comprises an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, or a benzyl. Related methods are provided, including a method for forming the disilylamine precursor and a method for vapor deposition.
Neilson, Robert H., Inorganic Chemistry, 1980, vol. 19, # 3, p. 755 - 758
作者:Neilson, Robert H.
DOI:——
日期:——
DISILYLAMINE PRECURSORS AND RELATED METHODS
申请人:[en]ENTEGRIS, INC.
公开号:WO2024112598A1
公开(公告)日:2024-05-30
A composition comprises a disilylamine precursor. The disilylamine precursor comprises a functional group attached to a nitrogen atom of the dilsilylamine precursor. The functional group comprises an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, or a benzyl. Related methods are provided, including a method for forming the disilylamine precursor and a method for vapor deposition.