Novel lactone compounds having alicyclic structure and their manufacturing method
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20020019545A1
公开(公告)日:2002-02-14
Lactone compounds of formula (1) are useful as monomers to form base resins for use in chemically amplified resist compositions adapted for micropatterning lithography.
1
R
1
is H or C
1-6
alkyl, R
2
is H or an acyl or alkoxycarbonyl group of 1-15 carbon atoms which may be substituted with halogen atoms, Z is a divalent C
1-15
organic group which forms a lactone ring with the carbonyloxy group, k is 0 or 1, and m is an integer from 0 to 5.
公式(1)的内酯化合物作为单体对于形成基树脂很有用,以用于化学增感光刻胶组合物,适用于微细图案制作。1R1为H或C1-6烷基,R2为H或含有1-15个碳原子的酰基或烷氧羰基基团,可能被卤素原子取代,Z为双价的C1-15有机基团,与羰氧基团形成内酯环,k为0或1,m为0到5之间的整数。