A photosensitive resin composition exhibiting an excellent cyclization rate and excellent storage stability is provided. In addition, a cured film obtained by using the photosensitive resin composition, a laminate, a method for manufacturing cured film, and a semiconductor device are provided. The photosensitive resin composition contains a specific thermal base generator and a precursor of a heterocyclic ring-containing polymer. The specific thermal base generator has a structure in which a hydroxyl group and an amide structure (-C(=O)-N=) are linked by a hydrocarbon group L, where L has a saturated hydrocarbon group on a path of the linking chain in L, and the number of atoms on the path of the linking chain is 3 or more.
本发明提供了一种光敏
树脂组合物,它具有优异的环化率和出色的储存稳定性。此外,还提供了使用该感光
树脂组合物获得的固化膜、层压板、固化膜的制造方法和半导体器件。光敏
树脂组合物包含特定热基发生器和含杂环聚合物的前体。特定热基发生器具有羟基和酰胺结构(-C(=O)-N=)通过烃基 L 连接的结构,其中 L 的连接链路径上具有饱和烃基,且连接链路径上的原子数为 3 个或更多。