PHOTOSENSITIVE RESIN COMPOSITION, POLYMERIC PRECURSOR, CURED FILM, LAMINATE, CURED FILM PRODUCTION METHOD, AND SEMICONDUCTOR DEVICE
申请人:FUJIFILM Corporation
公开号:EP3633455A1
公开(公告)日:2020-04-08
Provided are a photosensitive resin composition which has high breaking elongation and high excellent storage stability in case of forming a cured film, a polymer precursor, a cured film, a laminate, a method for producing a cured film, and a semiconductor device to solve the problems. A photosensitive resin composition is also provided that includes a polymer precursor selected from a polyimide precursor and a polybenzoxazole precursor; a photo-radical polymerization initiator; and a solvent, in which an acid value of an acid group contained in the polymer precursor and having a neutralization point in a pH range of 7.0 to 12.0 is in a range of 2.5 to 34.0 mgKOH/g, and either the polymer precursor contains a radically polymerizable group or the photosensitive resin composition includes a radically polymerizable compound other than the polymer precursor.
本发明提供了一种在形成固化膜的情况下具有高断裂伸长率和高优异储存稳定性的光敏树脂组合物、一种聚合物前体、一种固化膜、一种层压板、一种固化膜的生产方法以及一种解决上述问题的半导体设备。本发明还提供了一种光敏树脂组合物,它包括选自聚酰亚胺前体和聚苯并恶唑前体的聚合物前体;光辐射聚合引发剂;以及溶剂,其中聚合物前体所含酸性基团的酸值在 pH 值为 7.0至12.0范围内的酸值为2.5至34.0 mgKOH/g,聚合物前体含有可辐射聚合的基团,或者感光树脂组合物包括聚合物前体以外的可辐射聚合的化合物。