To provide a dithiane derivative, having a structure expressed by the following general formula 1:
where R
1
is —H, or —CH
3
, a polymer containing a monomer unit containing the dithiane derivative, a resist composition containing the polymer, and a method for manufacturing a semiconductor device using the resist composition.
提供一种二
硫杂环衍
生物,其结构由以下通式1表示:其中R1为—H或—
CH3,包含含有该二
硫杂环衍
生物的单体单位的聚合物,含有该聚合物的光刻胶组合物,以及使用该光刻胶组合物制造半导体器件的方法。