Formation of cluster ions of phosphorus atoms in pulsed-laser stimulated field evaporation of gallium phosphide
作者:Masaaki Tomita、Tsukasa Kuroda
DOI:10.1016/0039-6028(88)90620-6
日期:——
Abstract Cluster ions of phosphorus atoms, P 2 + ,P 3 + ,P 3 2+ , and P 4 + , are formed in pulsed-laser stimulated field evaporation of gallium phosphide. The ion distribution varies with field strength and laser density and can be clearly divided into three regimes. We clearly certified this kind of variation of appearance of field evaporated ions for the first time in semiconductors. This phenomenon
摘要 磷原子团离子P 2 + 、P 3 + 、P 3 2+ 和P 4 + 是在磷化镓脉冲激光激发场蒸发过程中形成的。离子分布随场强和激光密度而变化,可以清楚地分为三个区域。我们首次在半导体中明确证明了这种场蒸发离子外观的变化。这种现象也意味着具有足够功率的脉冲激光不仅会引起场蒸发,还会引起磷原子的团聚。因此,脉冲激光激发的磷化镓场蒸发不仅仅是一个热活化过程。