申请人:Brewer Science Inc.
公开号:US11078337B2
公开(公告)日:2021-08-03
The present invention is broadly concerned with novel directed self-assembly compositions, processes utilizing those compositions, and the resulting structures that are formed. The composition comprises a block copolymer of polystyrene and a polymethylmethacrylate block with polylactic acid side chains (“PS-b-P(MMA-LA)”). The block copolymer is capable of crosslinking and micro-phase separating into lines and spaces measuring about 10-nm or smaller with sub-20 nm L0 capability. Additionally, PS-b-P(MMA-LA) can be thermally annealed without a top-coat for simpler processing than the prior art. The polylactic acid side chains also increase the etch rate of the poly(methylmethacrylate) block when exposed to oxygen plasma, as well as lower the Tg.
本发明广泛涉及新型定向自组装组合物、利用这些组合物的工艺以及由此形成的结构。该组合物包括聚苯乙烯和聚甲基丙烯酸甲酯嵌段与聚乳酸侧链的嵌段共聚物("PS-b-P(MMA-LA)")。该嵌段共聚物能够交联和微相分离成约 10 纳米或更小的线和空间,具有低于 20 纳米 L0 的能力。此外,与现有技术相比,PS-b-P(MMA-LA) 可在无表面涂层的情况下进行热退火,加工过程更简单。聚乳酸侧链还能在暴露于氧等离子体时提高聚甲基丙烯酸甲酯嵌段的蚀刻速率,并降低 Tg。