A material for forming an organic film contains (A) a compound shown by the following general formula (1) and/or a polymer having a repeating unit shown by the following general formula (4), and (B) an organic solvent. In the general formula (1), AR1, AR2, AR3, AR4, AR5, and AR6 each represent a benzene ring or a naphthalene ring; R1 represents any group shown in the following formula (2); "n" represents an integer of 1 or 2; and W represents a divalent organic group having 2 to 50 carbon atoms. In the general formula (4), AR1, AR2, AR3, AR4, AR5, AR6, R1, "n", and W are as defined above; and R2 and R3 each represent a hydrogen atom or an organic group having 1 to 20 carbon atoms, and optionally bond to each other within a molecule to form a cyclic organic group. An object of the present invention is to provide a material for forming an organic film to enable high etching resistance and excellent twisting resistance without impairing the resin-derived carbon content; and a compound and a polymer suitable for the material for forming an organic film.
一种用于形成有机薄膜的材料包含(A)下式(1)所示的化合物和/或具有下式(4)所示重复单元的聚合物,以及(B)有机溶剂。在通式(1)中,AR1、AR2、AR3、AR4、AR5 和 AR6 分别代表苯环或
萘环;R1 代表下式(2)中所示的任何基团;"n "代表 1 或 2 的整数;W 代表具有 2 至 50 个碳原子的二价有机基团。在通式(4)中,AR1、AR2、AR3、AR4、AR5、AR6、R1、"n "和 W 如上定义;R2 和 R3 分别代表氢原子或具有 1 至 20 个碳原子的有机基团,并可选择在分子内相互键合以形成环状有机基团。本发明的目的是提供一种用于形成有机薄膜的材料,以在不影响
树脂衍生碳含量的情况下实现高抗蚀性和优异的抗扭曲性;以及一种适用于该用于形成有机薄膜的材料的化合物和聚合物。