RADIATION-SENSITIVE COMPOSITION, AMORPHOUS FILM, AND METHOD FOR FORMING RESIST PATTERN
申请人:Mitsubishi Gas Chemical Company, Inc.
公开号:US20180081270A1
公开(公告)日:2018-03-22
A radiation-sensitive composition comprising a resist base material (A), an optically active diazonaphthoquinone compound (B), and a solvent (C), wherein the content of the solvent (C) in the composition is 20 to 99% by mass, the content of components except for the solvent (C) is 1 to 80% by mass, and the resist base material (A) is a compound represented by the following formula (1):
wherein R
1
is a 2n-valent group of 1 to 30 carbon atoms; R
2
to R
5
are each independently an alkyl group of 1 to 10 carbon atoms, an aryl group of 6 to 10 carbon atoms, an alkenyl group of 2 to 10 carbon atoms, an alkoxy group of 1 to 30 carbon atoms, a halogen atom, a thiol group, or a hydroxyl group, wherein at least one of R
4
and/or at least one of R
5
is one or more kinds selected from a hydroxyl group and a thiol group; m
2
and m
3
are each independently an integer of 0 to 8; m
4
and m
5
are each independently an integer of 0 to 9, wherein m
4
and m
5
are not 0 at the same time; n is an integer of 1 to 4; and p
2
to p
5
are each independently an integer of 0 to 2.