2-Diazo-1-(2-naphthalen-1-ylsulfonylphenyl)ethanone

• 分子结构分类: 有机化合物 - 苯类化合物 - 萘
• 英文名称: 2-Diazo-1-(2-naphthalen-1-ylsulfonylphenyl)ethanone
• 英文别名: 2-diazo-1-(2-naphthalen-1-ylsulfonylphenyl)ethanone
• 化学式: C18H12N2O3S
• 分子量: 336.4
• InChiKey: QVIMLGILRXSXDD-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  3.7
• 重原子数：
  24
• 可旋转键数：
  4
• 环数：
  3.0
• sp3杂化的碳原子比例：
  0.0
• 拓扑面积：
  61.6
• 氢给体数：
  0
• 氢受体数：
  4

文献信息

• Resist composition and patterning process
  申请人：——

  公开号：US20030118934A1

  公开（公告）日：2003-06-26

  Resist compositions comprising as the base resin a polymer using tert-amyloxystyrene as a reactive group which is decomposable under the action of an acid to increase solubility in alkali have advantages including a significantly enhanced contrast of alkali dissolution rate before and after exposure, a high sensitivity, and a high resolution in the baking temperature range of 100-110° C. which is unachievable with tert-butoxystyrene. The compositions are best suited as a chemically amplified resist material for micropatterning in the manufacture of VLSI.

  抗蚀组合物包括以 tert-amyloxystyrene 作为反应基团的聚合物作为基础树脂，该基团在酸的作用下分解以增加在碱性溶液中的溶解度。这种组合物具有显着增强的碱溶解速率对比度，高灵敏度和高分辨率，适用于100-110°C的烘焙温度范围，而 tert-butoxystyrene 则无法实现。这些组合物最适合作为化学增强抗蚀材料用于微图案制造的VLSI。
• US6746817B2
  申请人：——

  公开号：US6746817B2

  公开（公告）日：2004-06-08