申请人:Echigo Masatoshi
公开号:US20080153031A1
公开(公告)日:2008-06-26
A radiation-sensitive composition containing a resist compound A, an acid generator B, and an acid crosslinking agent C. The resist compound A is (a) a polyphenol compound which is produced by the condensation of a C
5-45
aromatic ketone or aromatic aldehyde with a C
6-15
compound having from 1 to 3 phenolic hydroxyl groups, and, (b) its molecular weight is form 300 to 5000. The radiation-sensitive composition is solvent-soluble and exhibits a high sensitivity, high resolution, and high heat resistance.