THE REARRANGEMENT OF 9,10-DIARYLDIHYDROPHENANTHRENEDIOLS
作者:W. E. Bachmann
DOI:10.1021/ja01344a036
日期:1932.5
POLYCARBONATE RESIN AND ELECTROPHOTOGRAPHIC PHOTOSENSITIVE BODY USING THE SAME
申请人:MITSUBISHI GAS CHEMICAL COMPANY, INC.
公开号:EP2048180B1
公开(公告)日:2012-03-07
Resist composition
申请人:Echigo Masatoshi
公开号:US20080153031A1
公开(公告)日:2008-06-26
A radiation-sensitive composition containing a resist compound A, an acid generator B, and an acid crosslinking agent C. The resist compound A is (a) a polyphenol compound which is produced by the condensation of a C
5-45
aromatic ketone or aromatic aldehyde with a C
6-15
compound having from 1 to 3 phenolic hydroxyl groups, and, (b) its molecular weight is form 300 to 5000. The radiation-sensitive composition is solvent-soluble and exhibits a high sensitivity, high resolution, and high heat resistance.
COMPOSITION FOR FORMING BASE FILM FOR LITHOGRAPHY AND METHOD FOR FORMING MULTILAYER RESIST PATTERN
申请人:Oguro Dai
公开号:US20100316950A1
公开(公告)日:2010-12-16
A composition for forming an underlayer film for lithography for imparting excellent optical characteristics and etching resistance to an underlayer film for lithography, an underlayer film being formed of the composition and having a high refractive index (n) and a low extinction coefficient (k), being transparent, having high etching resistance, containing a significantly small amount of a sublimable component, and a method for forming a pattern using the underlayer film are provided. The composition for forming an underlayer film contains a naphthalene formaldehyde polymer having a specific unit obtained by reacting naphthalene and/or alkylnaphthalene with formaldehyde, and an organic solvent.