Photosensitive compound, photosensitive composition, resist pattern forming method, and device production process
申请人:Canon Kabushiki Kaisha
公开号:EP1956429A1
公开(公告)日:2008-08-13
A photosensitive compound has two or more structural units, in a molecule, represented by the following general formula (1):
wherein R1 to R10 are selected from the group consisting of hydrogen atom, halogen atom, alkyl group, alkoxy group, phenyl group, naphthyl group, and alkyl group in which a part or all of hydrogen atoms are substituted with fluorine atom; and X is a substituted or unsubstituted phenylene group or a substituted or unsubstituted naphthylene group.
光敏化合物分子中有两个或多个结构单元,由以下通式(1)表示:
其中 R1 至 R10 选自氢原子、卤素原子、烷基、烷氧基、苯基、萘基和部分或全部氢原子被氟原子取代的烷基组成的组;X 为取代或未取代的亚苯基或取代或未取代的亚萘基。