A silicone hyper-branched polymer surfactant is included in a rinsing solution which may be used to remove photoresist residues. The silicone hyper-branched polymer surfactant is prepared by polymerizing a monomer represented by the following chemical formula (1), where R
1
denotes a vinyl group and R
2
denotes hydrogen, and includes both a hydrophobic group and a hydrophilic group.
1
一种
硅超支化聚合物表面活性剂被包含在漂洗溶液中,可用于去除光阻残留物。该
硅超支化聚合物表面活性剂是通过聚合下列
化学式(1)所表示的单体制备而成,其中R1表示
乙烯基,R2表示氢,并且包含一个疏
水基团和一个亲
水基团。