Disclosed are photo or electron beam curable polymerizable compositions, and preparation thereof and devices containing such cured material. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools and other optical devices involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 248 nm, 193 nm and 157 nm lithographic tools, as well as other optical devices involving using high fluence irradiation.
本发明公开了可光固化或电子束固化的聚合组合物及其制备方法,以及含有此类固化材料的装置。该组合物含有完全不含或基本不含碳碳双键和三键的完全氢化或基本完全氢化的烃基材料,其中含有可光固化或电子束固化的末端基团或悬垂基团、低发气光
引发剂、任选的粘度调节组分和任选的填料。该组合物可在可见光、紫外线或电子束下固化。它能固化成一种低模量、低放气的聚合物材料。该组合物可用作粘合剂、密封剂或透镜灌封材料。它非常适合用于光刻工具和其他涉及深紫外线或真空紫外线辐射的光学设备,特别是用作 248 纳米、193 纳米和 157 纳米光刻工具以及其他涉及使用高通量辐照的光学设备的透镜灌封材料。