Facile synthesis of a novel class of organometalloid-containing ligands, the sila-β-diketones: preparation and physical and structural characterization of the copper(II) complexes, Cu[R′C(O)CHC(O)SiR3]2
作者:Kulbinder K Banger、Silvana C Ngo、Seiichiro Higashiya、Rolf U Claessen、Kenneth S Bousman、Poay N Lim、Paul J Toscano、John T Welch
DOI:10.1016/s0022-328x(03)00393-0
日期:2003.7
The substitution of a carbon atom by silicon provides an attractive, novel approach to modification of the thermal stability and volatility of metal-organic chemical vapor deposition precursors supported by beta-diketonate ancillary ligands. The low temperature reaction of the lithium enolates of acetyltrialkylsilanes with acyl chlorides affords the sila-beta-diketones, R'C(O)CH2C(O)SiR3 (R' = Me, Et, n-Pr, i-Pr, n-Bu, i-Bu, s-Bu, t-Bu; SiR3 = SiMe3, SiEt3, SiMe2(t-Bu), SiMe2(t-hexyl), Si(i-Pr)A in good yields. Multinuclear NMR studies suggest that the sila-beta-diketones exist as the enolic tautomer with a vinylsilane isomeric structure. Homoleptic Cu(II) sila-beta-diketonate complexes were prepared in a first pass study to evaluate how precursor performance is affected by modulation of the peripheral substituents in the ligands. Thermal analyses, (TGA, DSC) show that the silylated Cu(II) precursors (SiR3 = SiMe3; R' = t-Bu or i-Bu) have greater volatility than the corresponding carbon analogues. Some of the new Cu(11) complexes exist as liquids or low melting solids, which are preferred states for industrial deposition processes. X-ray diffraction studies of selected copper complexes showed them to have typical, square planar geometry; calculations of molecular volumes suggest that packing in the solid-state is less efficient for the silicon-containing complexes than for the non-silylated analogues. (C) 2003 Elsevier Science B.V. All rights reserved.