Disclosed is a silicon-containing film-forming material which contains an organosilane compound represented by the following general formula (1). (In the formula, R1-R4 may be the same or different and represent a hydrogen atom, an alkyl group having 1-4 carbon atoms, a vinyl group or a phenyl group; R5 represents an alkyl group having 1-4 carbon atoms, an acetyl group or a phenyl group; n represents an integer of 1-3; and m represents an integer of 1-2.)
揭示了一种含有
有机硅化合物的成膜材料,该
有机硅化合物由以下通式(1)表示。(在该式中,R1-R4可能相同或不同,表示氢原子,具有1-4个碳原子的烷基,
乙烯基或苯基;R5表示具有1-4个碳原子的烷基,乙酰基或苯基;n表示1-3的整数;m表示1-2的整数。)