Silicon functional di-t-butylsilanes such as (t-Bu)2SiCl2, (t-Bu)2Si(OMe)2 and (t-Bu)2SiH(OMe) were conveniently obtained in good yields via di-t-butylsilane, (t-Bu)2SiH2, which can readily be prepared from the reaction of dichlorosilane, H2SiCl2, with t-butyllithium.