Silicone Structure-Bearing Polymer, Resin Composition, and Photo-Curable Dry Film
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP2631259B1
公开(公告)日:2015-03-04
SILICONE STRUCTURE-BEARING POLYMER, RESIN COMPOSITION, AND PHOTO-CURABLE DRY FILM
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20130196114A1
公开(公告)日:2013-08-01
A silicone structure-bearing polymer having a crosslinking group within the molecule, containing an isocyanurate structure bonded within the molecule, and having a Mw of 3,000-500,000 is provided. The polymer overcomes the stripping problem that a coating is stripped from metal wirings of Cu or Al, electrodes, and SiN substrates.
RESIST UNDERLAYER COMPOSITION, AND METHOD OF FORMING PATTERNS USING THE COMPOSITION
申请人:SAMSUNG SDI CO., LTD.
公开号:US20190129307A1
公开(公告)日:2019-05-02
A resist underlayer composition and a method of forming patterns, the composition including a solvent; and a polymer that includes a structural unit represented by Chemical Formula 1 and a structural unit represented by Chemical Formula 2,