申请人:FUJIFILM Corporation
公开号:EP2045318A1
公开(公告)日:2009-04-08
The present invention provides a cleaning agent for cleaning a semiconductor device having copper wiring on the surface thereof following a chemical mechanical polishing process in a production process of a semiconductor device, including a compound represented by the following formula (I):
X1-L-X2 formula (I)
wherein, in formula (I), X1 and X2 each independently represent a monovalent substituent formed by removing one hydrogen atom from a heterocycle containing at least one nitrogen atom, and L represents a divalent linking group; and provides a cleaning method using the cleaning agent.
本发明提供了一种清洁剂,用于在半导体器件的生产过程中经过化学机械抛光工序后清洁表面有铜线的半导体器件,包括由下式(I)表示的化合物:
X1-L-X2 式(I)
其中,在式(I)中,X1 和 X2 各自独立地代表通过从含有至少一个氮原子的杂环中移除一个氢原子而形成的一价取代基,L 代表二价连接基团;并提供一种使用该清洗剂的清洗方法。