HUSZTHY, P.;LEMPERT, K.;SIMIG, G.;TAMAS, J., J. CHEM. RES. MICROFICHE, 1985, N 10, 309
作者:HUSZTHY, P.、LEMPERT, K.、SIMIG, G.、TAMAS, J.
DOI:——
日期:——
ORGANOMETALLIC COMPLEXES
申请人:Radu Nora Sabrina
公开号:US20090206327A1
公开(公告)日:2009-08-20
Organometallic complexes are provided having at least one charge transporting ligand, and methods for making the same, as well as devices and sub-assemblies including the same.
RADIATION SENSITIVE RESIN COMPOSITION AND POLYMER
申请人:Sakakibara Hirokazu
公开号:US20100255420A1
公开(公告)日:2010-10-07
A radiation-sensitive resin composition includes a polymer, an acid-labile group-containing resin, a radiation-sensitive acid generator, and a solvent, the polymer including repeating units shown by following general formulas (1) and (2).
wherein R
1
and R
2
represent a hydrogen atom, a methyl group, or a trifluoromethyl group, R
3
represents a linear or branched alkyl group having 1 to 6 carbon atoms or an alicyclic hydrocarbon group having 4 to 20 carbon atoms in which at least one hydrogen atom is substituted with a fluorine atom, or a derivative thereof, and Z represents a group that includes a group that generates an acid upon exposure to light. The radiation-sensitive resin composition produces an excellent pattern shape, reduces the amount of elution into an immersion liquid upon contact during liquid immersion lithography, ensures that a high receding contact angle is formed by a resist film and an immersion liquid, and rarely causes development defects.