TRANSITION METAL COMPOUND, PREPARATION METHOD THEREFOR, AND COMPOSITION FOR DEPOSITING TRANSITION METAL-CONTAINING THIN FILM, CONTAINING SAME
申请人:DNF CO., LTD.
公开号:US20190135840A1
公开(公告)日:2019-05-09
The present invention relates to: a novel transition metal compound; a preparation method therefor; a composition for depositing a transition metal-containing thin film, containing the same; a transition metal-containing thin film using the composition for depositing a transition metal-containing thin film; and a method for preparing a transition metal-containing thin film. The transition metal compound of the present invention has high thermal stability, high volatility, and high storage stability, and thus a transition metal-containing thin film having high-density and high-purity can be easily prepared by using the same as a precursor.
Syntheses and characterization of zirconium and hafnium complexes of amido-fluorenyl ligands [(NBut)SiMe2CH2(C13H8)]2− and [(NPri)SiMe2CH2(C13H8)]2−
作者:H.V. Rasika Dias、Ziyun Wang
DOI:10.1016/s0022-328x(97)00056-9
日期:1997.7
fluorenyl ligand. Lithiation followed by the treatment with zirconium or hafniumtetrachloride afforded the corresponding dichloro complexes [(η1-NPri)SiMe2CH2(η5-C13H8)]ZrCl2 (2) and [(η1-NPri)SiMe2CH2(η5-C13H8)]HfCl2 (3). These metal adducts were characterized by NMR spectroscopy, and in the case of 3 also by X-ray diffraction. Compound 3 shows a weak interaction between the formally 14-electron