A radiation-sensitive resin composition includes a first polymer including a first structural unit that includes a first acid-labile group; a radiation-sensitive acid generator; and a compound represented by formula (1). n is 1 or 2. R
1
represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms in a case in which n is 1. R
1
represents a divalent organic group having 1 to 20 carbon atoms in a case in which n is 2. R
2
represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms. E represents a group represented by formula (i). R
2
and E may taken together represent a ring structure having 3 to 20 ring atoms together with the nitrogen atom. X represents a divalent organic group having 1 to 20 carbon atoms. R
3
represents a second acid-labile group.
一种辐射敏感性
树脂组合物包括第一聚合物,其中包括第一个酸敏感基团的第一个结构单元;辐射敏感性酸发生剂;以及由式(1)表示的化合物。n为1或2。当n为1时,R1代表氢原子或具有1至20个碳原子的一价有机基团。当n为2时,R1代表具有1至20个碳原子的二价有机基团。R2代表氢原子或具有1至20个碳原子的一价有机基团。E代表由式(i)表示的基团。R2和E可能一起表示具有3至20个环原子的环结构,与氮原子一起。X代表具有1至20个碳原子的二价有机基团。R3代表第二个酸敏感基团。