作者:C.J. Chen、J.C. Huang、H.S. Chou、Y.H. Lai、L.W. Chang、X.H. Du、J.P. Chu、T.G. Nieh
DOI:10.1016/j.jallcom.2008.07.188
日期:2009.8
In the current study, we examined and compared the mixing and vitrification behavior of the Zr-Cu and Zr-Ti binary systems in the form of co-sputtered thin films with or without post-annealing. The co-sputtered Zr-Cu films are all amorphous under various co-sputtering conditions, suggesting the high vitrification tendency. The amorphous Zr-Cu thin film will start to crystallize into nano-crystalline Zr2CU and Zr7Cu10 phases upon long exposure at temperatures above 350 degrees C. On the other hand, it is difficult to form amorphous film with the Zr-Ti system, except at a low sputtering power of 30-50 W The low powers enable the co-sputtered Zr-Ti thin film to exhibit the diffuse hump in the X-ray diffraction. Examination by high resolution transmission electron microscopy reveals numerous fine nano-crystalline phases around 2 nm in the amorphous matrix. Upon exposure at 700 degrees C, the Zr-Ti films transform into crystalline hexagonal close-packed alpha and body-centered cubic beta phases. (C) 2008 Elsevier B.V. All rights reserved.