film/substrate interface. We have observed by secondary ion mass spectrometry, that a substantial amount of Si has diffused into the Cu–Ge in varying amounts that exhibit strong dependence on the anneal temperature. Despite the large amount of Si that has diffused into the films, the Cu3Ge maintains its low resistivity (ρ=10–15 μΩ cm) up to an anneal temperature of 600 °C, at which point the film completely loses
我们通过依次电子束沉积非晶 Ge 层和多晶 Cu 层,在 (100) Si 上沉积了
Cu3Ge 薄膜。然后将薄膜在流动的 N2 中在 150-600°C 的温度范围内退火 30 分钟,以诱导 Cu-Ge 薄膜的完全再结晶。 薄膜在很宽的退火温度范围内与 (100) Si 形成平滑的、原子级锐利的界面,这表明在薄膜/衬底界面上没有任何
化学反应,即化合物形成。我们已经通过二次离子质谱观察到,大量的 Si 以不同的量扩散到 Cu-Ge 中,这表现出对退火温度的强烈依赖性。尽管大量的 Si 已经扩散到薄膜中,