The properties of some volatile alkyl (di-alkylamido) zinc (11) and bis(di-alkylamido) zinc compounds: potential zinc precursors in MOCVD
作者:M.Azad Malik、P. O'Brien
DOI:10.1016/s0277-5387(97)00116-2
日期:1997.1
A series of compounds with the general formula Zn(NR2)(2) where R = Et, 'Pr, 'Bu; or RZnNR'(2) where R = Me, Et; R' = Et,'Pr,'Bu, SiMe3; and R = Np or 'Bu; R' = Et, 'Pr, 'Bu; have been synthesized and characterised. Vapour pressure measurements have been carried out to assess the potential suitability of such compounds as zinc precursors. Vapour pressures of alkyl(di-alkylamido)zinc(II) appear to be ca 5 Torr at 0 degrees C which makes then suitable zinc precursors for MOCVD (Molecular Organic Chemical Vapour Deposition) whereas bis(di-alkylamido)zinc(II) are viscous liquids with low volatility. (C) 1997 Elsevier Science Ltd.