Substituted trisilylamines. Part II. Reactions of amino- and hydroxysubstituted trisilylamines
作者:R. P. Bush、N. C. Lloyd
DOI:10.1039/j19690000257
日期:——
The pyrolytic rearrangement of amino-substituted trisilylamines to the isomeric trisilazanes is probably an intramolecular transamination. The pyrolysis of (Me3Si)2N·Si(Me2)NH2(I) gives (Me3Si)2N·Si(Me2)·NH·SiMe3 when an acid catalyst is present; and similarly (Me3Si)2N·Si(Me2)·OH (II) gives (Me3Si)2N·Si(Me2)·O·SiMe3. The silanol (II) reacts with bis(methylamino)dimethylsilane to give [(Me3Si)2N·Si(Me2)·O·]2SiMe2
CYCLIC GERMANIUM SILYLAMIDO PRECURSORS FOR GE-CONTAINING FILM DEPOSITIONS AND METHODS OF USING THE SAME
申请人:L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
公开号:US20210032275A1
公开(公告)日:2021-02-04
Methods for forming a Ge-containing film on a substrate comprise the steps of introducing a vapor of a cyclic Ge(II) silylamido precursor into a reactor having the substrate disposed therein and depositing at least part of the cyclic Ge(II) silylamido precursor onto the substrate to form the Ge-containing film using a vapor deposition method. The cyclic Ge(II) silylamido precursor is [SiMe
3
-(N—)—SiMe
2
-(N—)—SiMe
3
]Ge(II) or [tBu-(N—)—SiMe
2
-(N—)-tBu]Ge(II).