A novel tertiary alkylsilane is disclosed, which is useful as a variety of starting materials such as for photoreactive materials including semiconductor materials, insulative materials and photoresists, polymerization initiators and silicone-based ceramics precursors and is contributive to the safe and efficient production of high grade semiconductors.
本发明揭示了一种新型的三级烷基
硅烷,可用作多种起始物质,如用于光敏材料,包括半导体材料、绝缘材料和光刻胶、聚合
引发剂和基于
硅的陶瓷前体,有助于安全高效地生产高品质的半导体。