申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20140114080A1
公开(公告)日:2014-04-24
A fluorinated monomer has formula (1) wherein R
1
is H, F, methyl or trifluoromethyl, R
2
and R
3
are H or a monovalent hydrocarbon group, R
4
to R
6
each are a monovalent fluorinated hydrocarbon group, A is a divalent hydrocarbon group, and k
1
is 0, 1 or 2. A polymer derived from the fluorinated monomer may be endowed with appropriate water repellency, water slip, acid lability and hydrolysis and is useful as an additive polymer in formulating a resist composition.
一种氟化单体具有式(1),其中R1为H,F,甲基或三氟甲基,R2和R3为H或单价烃基,R4到R6各自为单价氟化烃基,A为二价烃基,k1为0、1或2。从氟化单体衍生的聚合物可以赋予适当的抗水性、水滑性、酸性易变性和水解性,并且在制定抗蚀涂料组合物时作为添加聚合物是有用的。