申请人:Air Products and Chemicals, Inc.
公开号:EP2110459A1
公开(公告)日:2009-10-21
Classes of liquid aminosilanes have been found which allow for the production of silicon carbo-nitride films of the general formula SixCyNz. These aminosilanes, in contrast to some of the precursors employed heretofore, are liquid at room temperature and pressure allowing for convenient handling. In addition, the invention relates to a process for producing such films.
The classes of compounds are generally represented by the formulas:
and mixtures thereof, wherein R and R1 in the formulas represent aliphatic groups typically having from 2 to about 10 carbon atoms, e.g., alkyl, cycloalkyl with R and R1 in formula A also being combinable into a cyclic group, and R2 representing a single bond, (CH2)n, a ring, or SiH2.
我们发现有一类液态氨基硅烷可以生产出通式为 SixCyNz 的碳氮化硅薄膜。这些氨基硅烷与之前使用的一些前体不同,在室温和压力下呈液态,便于处理。此外,本发明还涉及生产此类薄膜的工艺。
这几类化合物一般用以下公式表示:
及其混合物,其中式中的 R 和 R1 代表通常具有 2 至约 10 个碳原子的脂肪族基团,例如烷基、环烷基,式 A 中的 R 和 R1 也可组合成环状基团,R2 代表单键、(CH2)n、环或 SiH2。