[EN] CATALYST DEHYDROGENATIVE COUPLING OF CARBOSILANES WITH AMMONIA, AMNINES AND AMIDINES<br/>[FR] COUPLAGE DÉSHYDROGÉNATIF CATALYTIQUE DE CARBOSILANES AVEC DE L'AMMONIAC, DES AMINES ET DES AMIDINES
申请人:AIR LIQUIDE
公开号:WO2016160991A1
公开(公告)日:2016-10-06
Si-containing film forming compositions are disclosed comprising Si-N containing precursors. Also disclosed are methods of synthesizing the same and methods of using the same for vapor deposition. In particular, a catalytic dehydrogenative coupling of carbosilanes with ammonia, amines and amidines produces the Si-N containing precursors.