The aim of this investigation is to study thin-film thermoelectric linear arrays for high spatial temperature measurements and to analyze power laser energy profile. The sensitive area consists of a planar of 16 individual thin-film Au-Pd thermocouple junctions with 8 μm × 8 μm of surface area. This sensor allows 16 temperature measurements per 288 μm. It is processed by means of standard integrated circuit techniques. Thermal simulation of heat conduction in gold and palladium layers has been carried out. The sensor thermoelectric response has been characterized in transient regime and steady state. The time constant of thermocouple response is of the order of 140 μs. A linear relationship between the thermoelectric voltage and the incident power laser has been put in evidence. Using the linear array, a Gaussian profile of the incident laser beam is obtained.
                                    这项研究的目的是研究用于高空间温度测量的薄膜热电线性阵列,并分析功率激光能量曲线。敏感区域由表面积为 8 
μm × 8 μm 的 16 个独立薄膜金钯热电偶结组成。该传感器每 288 μm 可进行 16 次温度测量。它采用标准集成电路技术进行处理。对金层和钯层的热传导进行了热模拟。传感器的热电响应在瞬态和稳态下都有特征。热电偶响应的时间常数为 140 μs。热电电压与激光入射功率之间的线性关系已经得到证实。利用线性阵列,可以得到入射激光束的高斯轮廓。