申请人:——
公开号:US20040138491A1
公开(公告)日:2004-07-15
A process for synthesizing an aminosilane compound such as bis(tertiarybutylamino)silane is provided. In one aspect of the present invention, there is provided a process for making bis(tertiarybutylamino)silane comprising reacting a stoichiometric excess of tert-butylamine with dichlorosilane under anhydrous conditions sufficient such that a liquid comprising the bis(tertiarybutylamino)silane product is produced.
本发明提供了一种合成氨基硅烷化合物的方法,例如叔丁基氨基硅烷。在本发明的一个方面中,提供了一种制备双(叔丁基氨基)硅烷的方法,包括在无水条件下使用过量的叔丁基胺与二氯硅烷反应,使得产生含有双(叔丁基氨基)硅烷产物的液体。