MOCVD growth of boron nitride films from single source<scp>III</scp>–<scp>V</scp>precursor
作者:A. Ratna Phani、G. Sarala Devi、Sujit Roy、V. J. Rao
DOI:10.1039/c39930000684
日期:——
The sp2 and sp3 phases of boron nitride (BN) have been deposited on Si and Ni substrates by low pressure MO-CVD (metal organic chemical vapour deposition) at 450 °C from diethylaminoborane and the films were characterised by Fourier transform infrared (FTIR) and X-ray diffraction (XRD); a plausible mechanism of CVD is proposed from gas-phase decomposition studies, and to our knowledge this is the first report of the growth of BN by MO-CVD using a single source.
通过低压 MO-CVD(金属有机化学气相沉积)技术,在 450°C 下从二乙胺硼烷在硅和镍基底上沉积出了氮化硼 (BN) 的 sp2 和 sp3 相,并通过傅里叶变换红外光谱 (FTIR) 和 X 射线衍射 (XRD) 对薄膜进行了表征。