Fine Purification of Monoisotopic Silanes28SiH4 ,29SiH4 , and30SiH4via Distillation
摘要:
High-purity isotopically enriched (99.98% Si-28, 99.57% Si-29, and 99.83% Si-30) silane samples are prepared for the first time. The total hydrocarbon content of the samples is no higher than 0.1-0.3 ppm. The concentration of electroactive impurities in the silicon prepared from the purified monoisotopic silane is below 10(15) cm(-3).
Formation of impurity Si2OH6 in silane synthesized from silicon tetrafluoride
摘要:
The possibility of the reduction of hexafluorodisiloxane by calcium hydride in the synthesis of silane from silicon tetrafluoride has been studied. This reaction is shown to be not decisive for oxygen contamination of silane. The most likely reason for the appearance of impurity Si2OH6 in "fluoride" silane is the Ca(OH)(2)-catalyzed reaction of silane with trace water. The concentration of impurity Si2OH6 in silane at the stage of synthesis may be efficiently decreased by the preliminary purging of calcium hydride with a hydrogen (grade A) flow.
Formation of impurity Si2OH6 in silane synthesized from silicon tetrafluoride
作者:A. D. Bulanov、P. G. Sennikov、A. Yu. Sozin、A. Yu. Lashkov、O. Yu. Troshin
DOI:10.1134/s0036023611040061
日期:2011.4
The possibility of the reduction of hexafluorodisiloxane by calcium hydride in the synthesis of silane from silicon tetrafluoride has been studied. This reaction is shown to be not decisive for oxygen contamination of silane. The most likely reason for the appearance of impurity Si2OH6 in "fluoride" silane is the Ca(OH)(2)-catalyzed reaction of silane with trace water. The concentration of impurity Si2OH6 in silane at the stage of synthesis may be efficiently decreased by the preliminary purging of calcium hydride with a hydrogen (grade A) flow.
Fine Purification of Monoisotopic Silanes<sup>28</sup>SiH<sub>4</sub> ,<sup>29</sup>SiH<sub>4</sub> , and<sup>30</sup>SiH<sub>4</sub>via Distillation
作者:A. D. Bulanov、A. N. Moiseev、O. Yu. Troshin、V. V. Balabanov、D. V. Isaev
DOI:10.1023/b:inma.0000031984.83652.87
日期:2004.6
High-purity isotopically enriched (99.98% Si-28, 99.57% Si-29, and 99.83% Si-30) silane samples are prepared for the first time. The total hydrocarbon content of the samples is no higher than 0.1-0.3 ppm. The concentration of electroactive impurities in the silicon prepared from the purified monoisotopic silane is below 10(15) cm(-3).