2,2-Dimethyl-propionic acid 1,2,2,6,6-pentamethyl-piperidin-4-yl ester | 43224-14-2

• 分子结构分类: 有机化合物 - 有机杂环化合物 - 哌啶类
• 英文名称: 2,2-Dimethyl-propionic acid 1,2,2,6,6-pentamethyl-piperidin-4-yl ester
• 英文别名: (1,2,2,6,6-Pentamethylpiperidin-4-yl) 2,2-dimethylpropanoate；(1,2,2,6,6-pentamethylpiperidin-4-yl) 2,2-dimethylpropanoate
• CAS: 43224-14-2
• 化学式: C₁₅H₂₉NO₂
• 分子量: 255.401
• InChiKey: NAEHBKSGXPJIKQ-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  3.3
• 重原子数：
  18
• 可旋转键数：
  3
• 环数：
  1.0
• sp3杂化的碳原子比例：
  0.93
• 拓扑面积：
  29.5
• 氢给体数：
  0
• 氢受体数：
  3

文献信息

• POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
  申请人：Shin-Etsu Chemical Co., Ltd.

  公开号：US20200393760A1

  公开（公告）日：2020-12-17

  A positive resist composition comprising a base polymer comprising recurring units (a) having the structure of an ammonium salt of N-carbonylsulfonamide having an iodized aromatic ring, and recurring units (b1) having an acid labile group-substituted carboxyl group and/or recurring units (b2) having an acid labile group-substituted phenolic hydroxyl group exhibits a high sensitivity, high resolution, low edge roughness and dimensional uniformity, and forms a pattern of good profile after exposure and development.