申请人:Kodama Kunihiko
公开号:US20070003871A1
公开(公告)日:2007-01-04
A positive photosensitive composition comprises a compound capable of generating a specified sulfonic acid upon irradiation with one of an actinic ray and radiation and (B) a resin capable of decomposing under the action of an acid to increase the solubility in an alkali developer.
一种正性光敏组合物包括一种化合物,该化合物能够在接受活性光线或辐射照射后产生一种指定的磺酸,并且(B)一种树脂,该树脂在酸作用下分解以增加在碱性显影剂中的溶解度。