RESIST UNDERLAYER FILM FORMING COMPOSITION CONTAINING SILICON HAVING ANION GROUP
申请人:Shibayama Wataru
公开号:US20110287369A1
公开(公告)日:2011-11-24
There is provided a resist underlayer film forming composition for lithography for forming a resist underlayer film capable of being used as a hardmask. A resist underlayer film forming composition for lithography comprising a silane compound containing an anion group, wherein the silane compound containing an anion group is a hydrolyzable organosilane in which an organic group containing an anion group is bonded to a silicon atom and the anion group forms a salt structure, a hydrolysis product thereof, or a hydrolysis-condensation product thereof. The anion group may be a carboxylic acid anion, a phenolate anion, a sulfonic acid anion, or a phosphonic acid anion. The hydrolyzable organosilane may be a compound of Formula (1): R
1
a
R
2
b
Si(R
3
)
4−(a+b)
(1). A composition comprising a mixture of a hydrolyzable organosilane of Formula (1), and at least one organic silicon compound selected from the group consisting of a compound of Formula (2): R
4
a
Si(R
5
)
4−a
(2) and a compound of Formula (3): [R
6
c
Si(R
7
)
3−c
]
2
Y
b
(3); a hydrolysis product of the mixture; or a hydrolysis-condensation product of the mixture.
Resist underlayer film forming composition containing silicon having anion group
申请人:Nissan Chemical Industries, Ltd.
公开号:US08815494B2
公开(公告)日:2014-08-26
There is provided a method of making a semiconductor device utilizing a resist underlayer film forming composition comprising a silane compound containing an anion group, wherein the silane compound containing an anion group is a hydrolyzable organosilane in which an organic group containing an anion group is bonded to a silicon atom and the anion group forms a salt structure, a hydrolysis product thereof, or a hydrolysis-condensation product thereof. The anion group may be a carboxylic acid anion, a phenolate anion, a sulfonic acid anion, or a phosphonic acid anion. The hydrolyzable organosilane may be a compound of Formula (1): R1aR2bSi(R3)4−(a+b) (1).
NEGATIVE-TYPE PHOTOSENSITIVE WHITE COMPOSITION FOR TOUCH PANEL, TOUCH PANEL AND TOUCH PANEL PRODUCTION METHOD
申请人:TORAY INDUSTRIES, INC.
公开号:US20160161847A1
公开(公告)日:2016-06-09
The present invention provides a negative-type photosensitive white composition for a touch panel, the composition including: (A) a white pigment; (B) an alkali-soluble resin; (C) a polyfunctional monomer; and (D) a photopolymerization initiator.
NEGATIVE-TYPE PHOTOSENSITIVE COLORING COMPOSITION, CURED FILM, LIGHT-SHIELDING PATTERN FOR TOUCH PANEL, AND TOUCH PANEL MANUFACTURING METHOD
申请人:TORAY INDUSTRIES, INC.
公开号:US20150378258A1
公开(公告)日:2015-12-31
The purpose of the present invention is to provide a negative-type photosensitive coloring composition ideal for forming a white, light-blocking pattern and which not only has excellent chemical resistance, but also has extremely excellent heat resistance and does not yellow or crack even when undergoing high-temperature processing. This negative-type photosensitive coloring composition contains (A) a white pigment, (B) a polysiloxane obtained by co-hydrolyzate condensation of an alkoxysilane compound containing a compound of a specific structure, (C) polyfunctional acrylic monomers, (D) a photoradical polymerization initiator and (E) an organic solvent.