Pyroelectric properties of sol?gel derived lithium tantalite thin films
作者:M KAO
DOI:10.1016/s0921-4526(02)02271-8
日期:2003.5
Abstract Lithium tantalite (LiTaO3) thin films (∼0.5 μm ) have been successfully deposited on Pt (111)/ SiO 2 / Si (1 0 0) substrates by means of sol–gel spin-coating technology. Figures of merit for infrared detector were studied for the LiTaO3 thin films. There exists high figures of merit Fv of 2.1×10 −10 C cm/J and Fm of 2.4×10 −8 C cm/J because of the relative low dielectric constant (er) of 35