[EN] AROMATIC AMINO SILOXANE FUNCTIONALIZED MATERIALS FOR USE IN CAPPING POROUS DIELECTRICS<br/>[FR] MATÉRIAUX FONCTIONNALISÉS PAR AMINO SILOXANE AROMATIQUE DESTINÉS À ÊTRE UTILISÉS DANS LE REVÊTEMENT DE DIÉLECTRIQUES POREUX
申请人:MERCK PATENT GMBH
公开号:WO2019081450A1
公开(公告)日:2019-05-02
The present invention relates to new aromatic-amino functional siloxanes, which are compounds comprising one or two tail groups X2, and a linking group L of structure (2) linking each said tail group to said head group, wherein the head group X has structure (1), containing an optional organic moiety Y,wherein the attachment point of said tail group X2 through said linking group L to the head group X1, may be, at positions a, b, c, d, or e. Another aspect of this invention are compositions containing these novel aromatic amino functional siloxane. A further aspect of this invention are compositions comprised of the above novel aromatic-amino functional siloxanes, and also the composition resulting from the aging of these compositions at room temperature for about 1 day to about 4 weeks. Still further aspects of this invention are processes for forming self-assembled monolayers on a substrate, from the aged composition, and also the processes of coating these aged compositions on patterned porous dielectrics to cap them also the processes of metallization of these capped pattered porous dielectrics.
本发明涉及新的芳香胺基硅氧烷,这些化合物包括一个或两个尾基团X2,以及一个结构为(2)的连接基团L,将每个所述尾基团连接到所述头基团,其中头基团X具有结构(1),包含一个可选的有机基团Y,在所述尾基团X2通过所述连接基团L连接到头基团X1的附着点可能在位置a、b、c、d或e。本发明的另一个方面是含有这些新型芳香胺基硅氧烷的组合物。本发明的另一个方面是由上述新型芳香胺基硅氧烷组成的组合物,以及在室温下经过约1天至约4周老化的这些组合物产生的组合物。本发明的进一步方面是形成基板上自组装单分子层的方法,从老化的组合物开始,以及在图案化多孔介质上涂覆这些老化组合物的方法以封盖它们,还有这些封闭的图案化多孔介质的金属化方法。