Organometallic vapor phase epitaxy of AlGaAs/GaAs heterojunction bipolar transistors using tertiarybutylarsine
作者:T. S. Kim、B. Bayraktaroglu、T. S. Henderson、D. L. Plumton
DOI:10.1063/1.105044
日期:1991.5.6
We have studied the use of tertiarybutylarsine (t‐BuAsH2) for organometallicvaporphaseepitaxy (OMVPE) growth of AlGaAs/GaAsheterojunctionbipolartransistors (HBTs). Good dc characteristics were achieved with t‐BuAsH2‐grown HBT structures, including common‐emitter current gains higher than 200 and 1000 for n‐p‐n and p‐n‐p structures, respectively. Near‐ideal current gain dependence on the collector
Effect of H2 on nitrogen incorporation in the metalorganic chemical vapor deposition of GaAs1−yNy (0⩽y⩽0.08)
作者:B. F. Moody、P. T. Barletta、N. A. El-Masry、J. C. Roberts、M. E. Aumer、S. F. LeBoeuf、S. M. Bedair
DOI:10.1063/1.1464225
日期:2002.4.8
The effect of hydrogen on the incorporation of nitrogen in GaAs1−yNy grown by metalorganicchemicalvapordeposition (MOCVD) is reported. Nitrogen content as high as y=0.081 has been achieved when the use of H2 is completely avoided in the MOCVD growth of GaAs1−yNy. When H2 is added to the growth ambient, the value of y in GaAs1−yNy decreases as the relative percent of H2 in the carrier gas increases
Reflectance‐difference spectroscopy study of surface reactions in atomic layer epitaxy of GaAs using trimethylgallium and tertiarybutylarsine
作者:B. Y. Maa、P. D. Dapkus
DOI:10.1063/1.104916
日期:1991.5.20
A real‐time reflectance‐difference spectroscopy (RDS) study of surface reactions of trimethylgallium (TMGa) and tertiarybutylarsine (TBAs) with (001)GaAs surfaces in an ultrahigh vacuum environment is reported. These studies reveal several phases of atomiclayerepitaxy of GaAs using TMGa. A model consistent with various kinetics studies is established to explain the distinct behavior observed in RDS
报道了在超高真空环境中三甲基镓 (TMGa) 和叔丁基胂 (TBA) 与 (001) GaAs 表面的表面反应的实时反射差谱 (RDS) 研究。这些研究揭示了使用 TMGa 的 GaAs 原子层外延的几个阶段。建立了与各种动力学研究一致的模型,以解释在 TMGa 暴露期间在 RDS 中观察到的不同行为。结果表明,通过RDS监测可以达到最佳生长条件。TMGa 暴露循环中发生的自限机制被认为是由于 TMGa 在 As 原子上的选择性吸附和反应以及 Ga 空位诱导的富 Ga 表面重建。还表明,TBAs 是一种很有前途的原子层外延砷源。
Tertiary butylarsine grown GaAs solar cell
作者:V. S. Sundaram、B. A. Arau、J. E. Avery、A. L. Bailey、G. R. Girard、H. E. Hager、A. G. Thompson、L. M. Fraas
DOI:10.1063/1.100883
日期:1989.2.13
doped (both p and n type) gallium arsenide layers have been grown using trimethylgallium and tertiarybutylarsine in a low‐pressure metalorganic chemical vapor deposition reactor. Using an alternate arsenic source, namely, tertiarybutylarsine, a concentrator GaAssolarcell has been fabricated. Under 37 sun, air mass 1.5 illumination, the cell had an open‐circuit voltage of 1.095 V, a fill factor of
The compound [Cp′Mn(CO)2]Se2 (1) reacts with primary arsanes and phosphanes, and migration of the carbonylmetal fragment Cp′Mn(CO)2 (Cp′ = CH3C5H4) from the selenium to the arsenic or phosphorus center occurs. Products of these reactions are diselena-diarsetanes (4) or diselena-diphosphetanes (5). During the reaction of arsanes with 1, arsinidene complexes (2) are obtained in very good yields. Compounds
化合物[Cp'Mn(CO)2 ] Se 2(1)与伯a烷和膦反应,并且羰基金属片段Cp'Mn(CO)2(Cp'= CH 3 C 5 H 4)从硒中迁移出来到砷或磷中心发生。这些反应的产物是二硒代-二硬脂酸酯(4)或二硒代-二磷酸酯(5)。在of烷与1的反应过程中,以非常高的产率获得了a啶二烯络合物(2)。具有PSeP单元(6)的化合物可以作为膦类与1的反应副产物分离出来。