Vertical platinum sidewall structures 50 nm thick and 700 nm tall have been fabricated by Pt deposition from the thermal decomposition of tetrakis‐(trifluorophosphine)‐platinum using an effusive gas source followed by ion‐assisted etching. Scanning electron microscope micrographs show that the sidewalls have high uniformity, very fine grains, and very sharp contours, demonstrating a high degree of
50 nm 厚和 700 nm 高的垂直
铂侧壁结构已通过使用喷出气源的四(三
氟膦)-
铂的热分解和离子辅助蚀刻的 Pt 沉积制成。扫描电子显微镜显微照片显示侧壁具有高度的均匀性、非常细的晶粒和非常清晰的轮廓,表明高度的保形沉积。扫描俄歇显微镜确认仅在侧壁中存在
铂。对沉积的
铂膜进行 X 射线光电子能谱分析表明没有可检测到的杂质,透明胶带测试显示膜结合良好。该方法适用于大规模加工。