MOCVD of hard metallurgical coatings: Examples in the Cr–C–N system
作者:F. Maury
DOI:10.1016/j.electacta.2004.10.088
日期:2005.8
growth processes are mainly based on the use of bis(benzene)chromium as chromium source and various co-reactives. Then, from a good control of the reactive gas phase, it is possible to combine these MOCVD processes to grow in the same reactor protective coatings designed with a complex architecture based on polyphased, nanostructured or multilayer structure which exhibit enhanced properties. These deposition