Introduced here is a plasma polymerization apparatus and process. Example embodiments include a vacuum chamber in a substantially symmetrical shape to a central axis. A rotation rack may be operable to rotate about the central axis of the vacuum chamber. Additionally, reactive species discharge mechanisms positioned around a perimeter of the vacuum chamber in a substantially symmetrical manner from the outer perimeter of the vacuum chamber may be configured to disperse reactive species into the vacuum chamber. The reactive species may form a polymeric multi-layer coating on surfaces of the one or more devices. Each layer may have a different composition of atoms to enhance the water resistance, corrosion resistance, and fiction resistance of the polymeric multi-layer coating.
这里介绍的是一种等离子聚合设备和工艺。具体实施例包括一个与中心轴基本对称的真空室。旋转架可绕真空室的中轴线旋转。此外,以基本对称的方式从真空室外周环绕真空室设置的反应物放电机构可配置为将反应物分散到真空室中。反应物可在一个或多个装置的表面形成聚合物多层涂层。每一层都可以有不同的原子组成,以增强聚合物多层涂层的耐
水性、耐腐蚀性和耐虚构性。