Protodesilylation of the aryl moiety in (p-methoxyphenyl)dimethylsilyl and (2,6-dimethoxyphenyl)dimethylsilyl groups proceeds much faster than that in a phenyldimethylsilyl group under acidic conditions; these aryl groups can be substituted with an F atom to give organosilyl fluoride even in the presence of an acid-sensitive group such as an alkenyl group.