The present invention is directed to novel thia-tetraazaacenaphthylene compounds of Formula (I):
and pharmaceutically acceptable forms thereof and their synthesis and use as inhibitors of ATP-protein kinase interactions.
An anti-reflection coating-forming composition is provided. This composition includes a polymer and a solvent. The polymer has a structural unit represented by the formula (1):
1
wherein R
1
is a monovalent atom other than a hydrogen atom or a monovalent group, and n is an integer of 0-4, provided that when n is an integer of 2-4, a plural number of R
1
's are the same or different; R
2
and R
3
are each a monovalent atom or group; and X is a bivalent group. The anti-reflection coating formed from this composition has a high antireflective effect, does not generate intermixing with a resist film, and enables a good resist pattern profile excellent in resolution and precision in cooperation with a positive or negative resist.
提供了一种抗反射涂层形成组合物。这种组合物包括一种聚合物和一种溶剂。聚合物具有由式(1)表示的结构单元:
1
其中 R
1
是氢原子或一价基团以外的一价原子,n 是 0-4 的整数,但当 n 是 2-4 的整数时,R
1
的复数相同或不同;R
2
和 R
3
均为一价原子或基团;X 为二价基团。由这种组合物形成的抗反射涂层具有很高的抗反射效果,不会与抗蚀剂薄膜产生混杂,并且在与正极或负极抗蚀剂配合使用时,可以形成分辨率和精度极佳的抗蚀图案轮廓。
An Efficient Synthesis of 1-Substituted Acenaphthylenes and Acenaphthenes, Synthesis of Acenaphthene-1-carboxylic acid
作者:Nizar Haddad、Elias Abu-Shqara
DOI:10.1021/jo00099a047
日期:1994.10
Konstitution und konfiguration der photodimeren 1-substituierter acenaphthylene
作者:H Mayer、J Sauer
DOI:10.1016/s0040-4039(00)88270-2
日期:1983.1
Haddad Nizar, Abu-Shqara Elias, J. Org. Chem., 59 (1994) N 20, S 6090-6092