Disclosed herein is a siloxane-based resin prepared by hydrolyzing and polycondensing a cyclic siloxane compound, a silane compound having three hydrolysable functional groups and a silane compound having three hydrolysable functional groups and one heat-labile functional group, in an organic solvent in the presence of a catalyst and water. Also, disclosed herein is a method of forming an insulating film between interconnect layers of a semiconductor device using the siloxane-based resin thus prepared, whereby an insulating film having low dielectric constant as well as excellent mechanical properties can be obtained.
本发明公开了一种基于
硅氧烷的
树脂,其通过在有机溶剂中存在催化剂和
水的情况下
水解和聚合环状
硅氧烷化合物、具有三个
水解功能团的
硅烷化合物和具有三个
水解功能团和一个热敏功能团的
硅烷化合物而制备而成。同时,本发明还公开了一种使用所述
硅氧烷树脂形成半导体器件互连层之间绝缘膜的方法,从而可以获得具有低介电常数和优异机械性能的绝缘膜。