Soluble polycyclosilane–polysiloxane hybrid material and silicon thin film with optical properties at 193 nm and etch selectivity
作者:Sung Jin Park、Hyeon Mo Cho、Myong Euy Lee、Miyoung Kim、Kwenwoo Han、Seunghee Hong、Sanghak Lim、Hansong Lee、Byeonggyu Hwang、Sang Kyun Kim、Sangdeok Shim、Philjae Kang、Moon-Gun Choi
DOI:10.1039/c4tc01917b
日期:——
Silicon thin films that fulfil the needs of current semiconductor lithography were prepared from a new class of polycyclosilane–polysiloxane hybrid materials.