申请人:Hoechst Aktiengesellschaft
公开号:US05162559A1
公开(公告)日:1992-11-10
A silylation reagent is useful for preparing binders which are soluble in aqueous alkali and contain silanyl groups in the side chain, comprises a compound having the formula I (A-B.sub.n).sub.m C (I) wherein A denotes a silanyl group containing at least 2 silicon atoms in total linked to each other, but not more than 3 silicon atoms linked to each other in an unbranched chain of silicon atoms; B denotes a bridging group; C denotes a functional group which is capable of forming a covalent bond with an aromatic, aliphatic or cycloaliphatic hydroxyl group; n denotes 0 or 1; and m denotes 1 or 2. Binders prepared with the silylation reagents described are soluble in aqueous alkali and exhibit a high resistance to plasma etching and a high storage stability, and are resistant to rediation with a wavelength of greater than 300 nm.
一种用于制备在水性碱性溶液中可溶且侧链含有硅基团的粘合剂的硅基化试剂,包括具有公式I(A-B.sub.n).sub.m C(I)的化合物,其中A表示含有至少2个硅原子的硅基团,这些硅原子总共相互连接,但不超过3个硅原子相互连接在硅原子的非分支链中;B表示桥连基团;C表示能够与芳香族、脂肪族或环脂肪族羟基团形成共价键的官能团;n表示0或1;m表示1或2。使用所述硅基化试剂制备的粘合剂在水性碱性溶液中可溶,且表现出高抗等离子体刻蚀性和高储存稳定性,并且对大于300nm波长的辐射具有抗性。