Brown, Paul; Mahon, Mary F.; Molloy, Kieran C., Journal of the Chemical Society, Dalton Transactions
作者:Brown, Paul、Mahon, Mary F.、Molloy, Kieran C.
DOI:——
日期:——
[EN] PROCESS FOR PREPARING ORGANOTIN COMPOUNDS<br/>[FR] PROCÉDÉ DE PRÉPARATION DE COMPOSÉS D'ORGANO-ÉTAIN
申请人:[en]ENTEGRIS, INC.
公开号:WO2022165381A1
公开(公告)日:2022-08-04
Provided is a facile process for preparing certain organotin compounds having alkyl and alkylamino substituents. The process provides organotin precursor compounds, for example tris(dimethylamido)isopropyl tin, in a highly pure form. As such, the products of the process are particularly useful in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in microelectronic device manufacturing.